Department of Materials Physics,
Nagoya University Quantum Spintronics 　
Moriyama Group

Contents

• Fabrication tools
• Measurement systems
• Others

Lab. Instruments

Fabrication tools

6-target sputtering system:

6-target sputtering system & Kaufmann Ion Gun：

3-element deposition:

Field cooling furnace:

Maskless lithography system:

Measurement systems

THz spectroscope & cryostat:

Glovebox:

GHz prober:

Rotating magnet GHz prober：

Spin-torque FMR：

Flip-chip FMR：

Magneto-optical Kerr effect measurement system：

Atomic force microscope:

Vibrating sample magnetometer：

Multipurpose laser microscope:

Rotating field magnet & cryostat:

Others

NC milling: