Department of Materials Physics,
Nagoya University Quantum Spintronics 　
Moriyama Group

Contents

• Fabrication tools
• Measurement systems
• Others

Lab. Instruments

Fabrication tools

6-target sputtering system:

3-element deposition:

Field cooling furnace:

Maskless lithography system:

Measurement systems

THz spectroscope & cryostat:

Glovebox:

GHz prober:

Atomic force microscope:

Multipurpose laser microscope:

Rotating field magnet & cryostat:

Others

NC milling: